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Argon fluoride laser

The argon fluoride laser (ArF laser) is a particular type of excimer laser,[1] which is sometimes (more correctly) called an exciplex laser. With its 193-nanometer wavelength, it is a deep ultraviolet laser, which is commonly used in the production of semiconductor integrated circuits, eye surgery, micromachining, and scientific research. "Excimer" is short for "excited dimer", while "exciplex" is short for "excited complex". An excimer laser typically uses a mixture of a noble gas (argon, krypton, or xenon) and a halogen gas (fluorine or chlorine), which under suitable conditions of electrical stimulation and high pressure, emits coherent stimulated radiation (laser light) in the ultraviolet range.

ArF (and KrF) excimer lasers are widely used in high-resolution photolithography machines, a critical technology for microelectronic chip manufacturing. Excimer laser lithography[2][3] has enabled transistor feature sizes to shrink from 800 nanometers in 1990 to 7 nanometers in 2018.[4][5][6] Extreme ultraviolet lithography machines have replaced ArF photolithography machines in some cases as they enable even smaller feature sizes while increasing productivity, as EUV machines can provide sufficient resolution in fewer steps.[7]

The development of excimer laser lithography has been highlighted as one of the major milestones in the 50-year history of the laser.[8][9]

  1. ^ Basting, D.; Marowsky, G. (2005). "Introductory Remarks". Excimer Laser Technology. Berlin: Springer-Verlag. pp. 1–7. Bibcode:2005elt..book....1B. doi:10.1007/3-540-26667-4_1. ISBN 3-540-20056-8.
  2. ^ Jain, K.; Willson, C.G.; Lin, B.J. (1982). "Ultrafast deep UV Lithography with excimer lasers". IEEE Electron Device Letters. 3 (3): 53–55. Bibcode:1982IEDL....3...53J. doi:10.1109/EDL.1982.25476. S2CID 43335574.
  3. ^ Jain, Kanti (1987-03-11). Luk, Ting-Shan (ed.). "Advances In Excimer Laser Lithography". Excimer Lasers and Optics. 0710. SPIE: 35. Bibcode:1987SPIE..710...35J. doi:10.1117/12.937294. S2CID 136477292.
  4. ^ "Samsung Starts Industry's First Mass Production of System-on-Chip with 10-Nanometer FinFET Technology". news.samsung.com. Retrieved 2021-10-25.
  5. ^ "Lasers and Moore's Law". spie.org. Retrieved 2021-10-25.
  6. ^ "TSMC Kicks Off Volume Production of 7nm Chips". AnandTech. 2018-04-28. Retrieved 2018-10-20.
  7. ^ "EUV Lithography Finally Ready for Chip Manufacturing". IEEE Spectrum. January 5, 2018.
  8. ^ "SPIE / Advancing the Laser / 50 Years and into the Future" (PDF).
  9. ^ "U.K. Engineering & Physical Sciences Research Council / Lasers in Our Lives / 50 Years of Impact" (PDF). Archived from the original (PDF) on September 13, 2011.

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